Advanced two-objective optimization of thickness and large-area homogeneity of ZnO ultrathin films deposited by atomic layer deposition
Article in Journal of Vacuum Science & Technology A Vacuum Surfaces and Films (November 2023)
The most recent citing publications are shown below. View all 7 publications that cite this research output on Dimensions.
Article in Journal of Vacuum Science & Technology A Vacuum Surfaces and Films (November 2023)
Article in Mathematical Methods in the Applied Sciences (December 2022)
Article in Numerical Linear Algebra with Applications (September 2022)