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Chapter title |
Change in Microstructure and Magnetic Properties of Transition Metal Nitride Thin Films by Substrate Temperature
|
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Chapter number | 8 |
Book title |
4th International Conference on Nanotechnologies and Biomedical Engineering
|
Published by |
Springer, Cham, September 2019
|
DOI | 10.1007/978-3-030-31866-6_8 |
Book ISBNs |
978-3-03-031865-9, 978-3-03-031866-6
|
Authors |
M. Kamp, L. Voß, T. Bichel, M. Hicke, U. Schürmann, L. Kienle |