Manufacturing Changeover Time Reduction for Dry Etching Tools in Wafer Fabrication Industry Using Single-Minute-Exchange-of-Dies (SMED)
Book chapter in Lecture Notes in Mechanical Engineering (August 2024)
The most recent citing publications are shown below. View all 18 publications that cite this research output on Dimensions.
Book chapter in Lecture Notes in Mechanical Engineering (August 2024)
Article in Future Internet (June 2024)
Article in Sensors (March 2024)