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Metrology

Overview of attention for book
Cover of 'Metrology'

Table of Contents

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    Book Overview
  2. Altmetric Badge
    Chapter 1 Dimensional Metrology Using Mode-Locked Lasers
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    Chapter 2 Nanopositioning and Nanomeasuring Machines
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    Chapter 3 Confocal Microscopy for Surface Profilometry
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    Chapter 4 Optical Sensors for Machine Tool Metrology
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    Chapter 5 Optical Micro-CMM
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    Chapter 6 Machine Tool Calibration
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    Chapter 7 Accuracy and Performance Analysis of Machine Tools
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    Chapter 8 Machine Tool Prognosis for Precision Manufacturing
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    Chapter 9 Cylindrical Gear Metrology
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    Chapter 10 High-Speed Measurement of Complex Shaped Parts by Laser Triangulation for In-Line Inspection
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    Chapter 11 Micro-dimensional Measurement by a Micro-probing System
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    Chapter 13 Measurements in Additive Manufacturing
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    Chapter 14 In-Line Measurement Technology and Quality Control
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    Chapter 15 In-Process Measurement of Subwavelength Structures
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    Chapter 17 Optical Scatterometry for Nanostructure Metrology
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    Chapter 18 Contact-Type Micro Thermal Sensor for Surface Defect Detection
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    Chapter 19 X-Ray Computed Tomography for Dimensional Metrology
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    Chapter 20 Uncertainty Estimation in Computational Tools in Metrology
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    Chapter 21 Molecular Dynamics Characterization of a Force Sensor Integrated Fast Tool Servo for On-Machine Surface Metrology
Attention for Chapter 17: Optical Scatterometry for Nanostructure Metrology
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Chapter title
Optical Scatterometry for Nanostructure Metrology
Chapter number 17
Book title
Metrology
Published by
Springer, Singapore, January 2019
DOI 10.1007/978-981-10-4938-5_17
Book ISBNs
978-9-81-104937-8, 978-9-81-104938-5
Authors

Xiuguo Chen, Shiyuan Liu, Chen, Xiuguo, Liu, Shiyuan

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Mendeley readers

Mendeley readers

The data shown below were compiled from readership statistics for 5 Mendeley readers of this research output. Click here to see the associated Mendeley record.

Geographical breakdown

Country Count As %
Unknown 5 100%

Demographic breakdown

Readers by professional status Count As %
Professor > Associate Professor 1 20%
Student > Doctoral Student 1 20%
Student > Master 1 20%
Unknown 2 40%
Readers by discipline Count As %
Engineering 2 40%
Physics and Astronomy 1 20%
Unknown 2 40%