Highly elastic hard PECVD TiSiC:H/a-SiC:H coatings with enhanced erosion and corrosion resistance: The trampoline effect
Article in Journal of Vacuum Science & Technology A Vacuum Surfaces and Films (June 2023)
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Article in Journal of Vacuum Science & Technology A Vacuum Surfaces and Films (June 2023)
Article in Scientific Reports (August 2021)