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Mendeley readers
Chapter title |
Simulation based sensitivity analysis and optimization of Scatterometry measurements for future semiconductor technology nodes
|
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Chapter number | 101 |
Book title |
Fringe 2009
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Published by |
Springer, Berlin, Heidelberg, January 2009
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DOI | 10.1007/978-3-642-03051-2_101 |
Book ISBNs |
978-3-64-203050-5, 978-3-64-203051-2
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Authors |
Valeriano Ferreras Paz, Thomas Schuster, Karsten Frenner, Wolfgang Osten, Laszlo Sziksai, Manfred Mört, Christoph Hohle, Harald Bloess, Paz, Valeriano Ferreras, Schuster, Thomas, Frenner, Karsten, Osten, Wolfgang, Sziksai, Laszlo, Mört, Manfred, Hohle, Christoph, Bloess, Harald |
Mendeley readers
The data shown below were compiled from readership statistics for 2 Mendeley readers of this research output. Click here to see the associated Mendeley record.
Geographical breakdown
Country | Count | As % |
---|---|---|
Unknown | 2 | 100% |
Demographic breakdown
Readers by professional status | Count | As % |
---|---|---|
Other | 1 | 50% |
Unknown | 1 | 50% |
Readers by discipline | Count | As % |
---|---|---|
Physics and Astronomy | 1 | 50% |
Unknown | 1 | 50% |