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Chapter title |
Control of Nanosensors Forming on Base of Aluminum Template
|
---|---|
Chapter number | 20 |
Book title |
Dynamics and Control of Advanced Structures and Machines
|
Published by |
Springer, Cham, January 2019
|
DOI | 10.1007/978-3-319-90884-7_20 |
Book ISBNs |
978-3-31-990883-0, 978-3-31-990884-7
|
Authors |
A. Vakhrushev, R. Valeev, A. Fedotov, A. Severyukhin, Vakhrushev, A., Valeev, R., Fedotov, A., Severyukhin, A. |