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| Chapter title |
Sub-Diffraction-Limited Nanolithography
|
|---|---|
| Chapter number | 7 |
| Book title |
Engineering Optics 2.0
|
| Published by |
Springer, Singapore, January 2019
|
| DOI | 10.1007/978-981-13-5755-8_7 |
| Book ISBNs |
978-9-81-135754-1, 978-9-81-135755-8
|
| Authors |
Xiangang Luo, Luo, Xiangang |