You are seeing a free-to-access but limited selection of the activity Altmetric has collected about this research output.
Click here to find out more.
Chapter title |
Dry Etching
|
---|---|
Chapter number | 60 |
Book title |
Handbook of Visual Display Technology
|
Published by |
Springer Berlin Heidelberg, January 2012
|
DOI | 10.1007/978-3-540-79567-4_60 |
Book ISBNs |
978-3-54-079566-7, 978-3-54-079567-4
|
Authors |
Eugen Stamate, Geun Young Yeom |
Editors |
Janglin Chen, Wayne Cranton, Mark Fihn |