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Chapter title |
Mechanisms of Surface State Formation at Si/SiO 2 Interface in the Nanosized MOS Transistors
|
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Chapter number | 34 |
Book title |
Advances in Thin Films, Nanostructured Materials, and Coatings
|
Published by |
Springer, Singapore, January 2019
|
DOI | 10.1007/978-981-13-6133-3_34 |
Book ISBNs |
978-9-81-136132-6, 978-9-81-136133-3
|
Authors |
A. N. Volkov, D. V. Andreev, V. M. Maslovsky, Volkov, A. N., Andreev, D. V., Maslovsky, V. M. |