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Chapter title |
Tribology in Chemical–Mechanical Planarization
|
---|---|
Chapter number | 23 |
Book title |
Tribology for Scientists and Engineers
|
Published by |
Springer, New York, NY, January 2013
|
DOI | 10.1007/978-1-4614-1945-7_23 |
Book ISBNs |
978-1-4614-1944-0, 978-1-4614-1945-7
|
Authors |
Sukbae Joo, Hong Liang, Joo, Sukbae, Liang, Hong |