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| Chapter title |
Depositionsverfahren
|
|---|---|
| Chapter number | 7 |
| Book title |
Silizium-Halbleitertechnologie
|
| Published by |
Springer Vieweg, Wiesbaden, January 2019
|
| DOI | 10.1007/978-3-658-23444-7_7 |
| Book ISBNs |
978-3-65-823443-0, 978-3-65-823444-7
|
| Authors |
Ulrich Hilleringmann |