Scalable growth of atomically thin MoS2 layers in a conventional MOCVD system using molybdenum dichloride dioxide as the molybdenum source
Article in Applied Surface Science (November 2023)
The most recent citing publications are shown below. View all 76 publications that cite this research output on Dimensions.
Handbuch der chemischen Elemente
Monograph (January 2023)
Low-temperature plasma atomic layer etching of molybdenum via sequential oxidation and chlorination
Article in Journal of Vacuum Science & Technology A Vacuum Surfaces and Films (January 2022)