Radiation defects as probes for the copper and nickel contamination during the chemomechanical polishing of Si wafers
Article in Materials Science in Semiconductor Processing (January 2024)
The most recent citing publications are shown below. View all 19 publications that cite this research output on Dimensions.
Article in Materials Science in Semiconductor Processing (January 2024)
Article in The Journal of Physical Chemistry C (October 2023)
Article in Spectrochimica Acta Part B Atomic Spectroscopy (August 2023)