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Metal Impurities in Silicon- and Germanium-Based Technologies

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Cover of 'Metal Impurities in Silicon- and Germanium-Based Technologies'

Table of Contents

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    Book Overview
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    Chapter 1 Introduction
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    Chapter 2 Basic Properties of Transition Metals in Semiconductors
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    Chapter 3 Source of Metals in Si and Ge Crystal Growth and Processing
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    Chapter 4 Characterization and Detection of Metals in Silicon and Germanium
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    Chapter 5 Electrical Activity of Iron and Copper in Si, SiGe and Ge
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    Chapter 6 Electrical Properties of Metals in Si and Ge
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    Chapter 7 Impact of Metals on Silicon Devices and Circuits
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    Chapter 8 Gettering and Passivation of Metals in Silicon and Germanium
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    Chapter 9 Modeling of Metal Properties in Si, Si 1− x Ge x and Ge
Attention for Chapter 4: Characterization and Detection of Metals in Silicon and Germanium
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