Multicomponent and Multilayered Thin Films for Advanced Microtechnologies: Techniques, Fundamentals…
Springer Netherlands
Chapter title |
Pulsed Excimer Laser Induced Reactions at the Tungsten-Silicon Interface
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Chapter number | 31 |
Book title |
Multicomponent and Multilayered Thin Films for Advanced Microtechnologies: Techniques, Fundamentals and Devices
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Published by |
Springer, Dordrecht, January 1993
|
DOI | 10.1007/978-94-011-1727-2_31 |
Book ISBNs |
978-9-40-104757-9, 978-9-40-111727-2
|
Authors |
S. Luby, E. Majkova, V. Daniska, R. Senderak, E. D’ Anna, G. Leggieri, A. Luches, M. Martino |
Country | Count | As % |
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Unknown | 1 | 100% |
Readers by professional status | Count | As % |
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Professor > Associate Professor | 1 | 100% |
Readers by discipline | Count | As % |
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Physics and Astronomy | 1 | 100% |