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Chapter title |
Growth, Properties and Applications of Epitaxial Silicides
|
---|---|
Chapter number | 25 |
Book title |
Multicomponent and Multilayered Thin Films for Advanced Microtechnologies: Techniques, Fundamentals and Devices
|
Published by |
Springer, Dordrecht, January 1993
|
DOI | 10.1007/978-94-011-1727-2_25 |
Book ISBNs |
978-9-40-104757-9, 978-9-40-111727-2
|
Authors |
S. Mantl |