Ion Implantation: Equipment and Techniques
Springer Berlin Heidelberg
Chapter title |
Doping Behavior of Implanted Magnesium in Silicon
|
---|---|
Chapter number | 54 |
Book title |
Ion Implantation: Equipment and Techniques
|
Published by |
Springer, Berlin, Heidelberg, January 1983
|
DOI | 10.1007/978-3-642-69156-0_54 |
Book ISBNs |
978-3-64-269158-4, 978-3-64-269156-0
|
Authors |
H. Sigmund, D. Weiß, Sigmund, H., Weiß, D. |
Country | Count | As % |
---|---|---|
Unknown | 5 | 100% |
Readers by professional status | Count | As % |
---|---|---|
Student > Bachelor | 2 | 40% |
Student > Ph. D. Student | 1 | 20% |
Student > Master | 1 | 20% |
Unknown | 1 | 20% |
Readers by discipline | Count | As % |
---|---|---|
Physics and Astronomy | 2 | 40% |
Materials Science | 2 | 40% |
Unknown | 1 | 20% |