Ion Implantation: Equipment and Techniques
Springer Berlin Heidelberg
Chapter title |
High Temperature Implantation of Powders Using a Horizontal Ion Beam
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Chapter number | 23 |
Book title |
Ion Implantation: Equipment and Techniques
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Published by |
Springer, Berlin, Heidelberg, January 1983
|
DOI | 10.1007/978-3-642-69156-0_23 |
Book ISBNs |
978-3-64-269158-4, 978-3-64-269156-0
|
Authors |
J. P. F. Sellschop, J. F. Prins, U. von Wimmersperg, Sellschop, J. P. F., Prins, J. F., von Wimmersperg, U. |