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Chapter title |
Mass Production of Nanometre Devices
|
---|---|
Chapter number | 3 |
Book title |
Future Trends in Microelectronics
|
Published by |
Springer, Dordrecht, January 1996
|
DOI | 10.1007/978-94-009-1746-0_3 |
Book ISBNs |
978-9-40-107280-9, 978-9-40-091746-0
|
Authors |
Alec N. Broers, Broers, Alec N. |