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Timeline
Chapter title |
Metallisierung und Kontakte
|
---|---|
Chapter number | 8 |
Book title |
Silizium-Halbleitertechnologie
|
Published by |
Vieweg+Teubner Verlag, Wiesbaden, January 2004
|
DOI | 10.1007/978-3-322-94072-8_8 |
Book ISBNs |
978-3-51-930149-3, 978-3-32-294072-8
|
Authors |
Ulrich Hilleringmann |