You are seeing a free-to-access but limited selection of the activity Altmetric has collected about this research output.
Click here to find out more.
Title |
Silizium-Halbleitertechnologie
|
---|---|
Published by |
Vieweg+Teubner Verlag, March 2013
|
DOI | 10.1007/978-3-322-94072-8 |
ISBNs |
978-3-51-930149-3, 978-3-32-294072-8
|
Authors |
Hilleringmann, Ulrich |