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Chapter title |
Anhang
|
---|---|
Chapter number | 11 |
Book title |
Halbleiter-Technologie
|
Published by |
Springer, Berlin, Heidelberg, January 1991
|
DOI | 10.1007/978-3-642-58235-6_11 |
Book ISBNs |
978-3-54-053873-8, 978-3-64-258235-6
|
Authors |
Ingolf Ruge, Hermann Mader |