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| Chapter title |
Mikromechanik
|
|---|---|
| Chapter number | 10 |
| Book title |
Halbleiter-Technologie
|
| Published by |
Springer, Berlin, Heidelberg, January 1991
|
| DOI | 10.1007/978-3-642-58235-6_10 |
| Book ISBNs |
978-3-54-053873-8, 978-3-64-258235-6
|
| Authors |
Ingolf Ruge, Hermann Mader |