You are seeing a free-to-access but limited selection of the activity Altmetric has collected about this research output.
Click here to find out more.
Chapter title |
Preliminary Survey
|
---|---|
Chapter number | 1 |
Book title |
The Physics of Microfabrication
|
Published by |
Springer, Boston, MA, January 1982
|
DOI | 10.1007/978-1-4899-2160-4_1 |
Book ISBNs |
978-1-4899-2162-8, 978-1-4899-2160-4
|
Authors |
Ivor Brodie, Julius J. Muray |