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The Physics of Microfabrication

Overview of attention for book
The Physics of Microfabrication
Springer US

Table of Contents

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    Book Overview
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    Chapter 1 Preliminary Survey
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    Chapter 2 Particle Beams: Sources, Optics, and Interactions
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    Chapter 3 Thin Films
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    Chapter 4 Pattern Generation
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    Chapter 5 Special Processes Developed for Microcircuit Technology
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    Chapter 6 Submicron Microscopy and Microprobes
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    Chapter 7 Future Directions
Attention for Chapter 3: Thin Films
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Chapter title
Thin Films
Chapter number 3
Book title
The Physics of Microfabrication
Published by
Springer, Boston, MA, January 1982
DOI 10.1007/978-1-4899-2160-4_3
Book ISBNs
978-1-4899-2162-8, 978-1-4899-2160-4
Authors

Ivor Brodie, Julius J. Muray, Brodie, Ivor, Muray, Julius J.

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