You are seeing a free-to-access but limited selection of the activity Altmetric has collected about this research output.
Click here to find out more.
Mendeley readers
| Title |
Optical properties and bandgap evolution of ALD HfSiOx films
|
|---|---|
| Published in |
Discover Nano, February 2015
|
| DOI | 10.1186/s11671-014-0724-z |
| Pubmed ID | |
| Authors |
Wen Yang, Michael Fronk, Yang Geng, Lin Chen, Qing-Qing Sun, Ovidiu D Gordan, Peng zhou, Dietrich RT Zahn, David Wei Zhang |
| Abstract |
Hafnium silicate films with pure HfO2 and SiO2 samples as references were fabricated by atomic layer deposition (ALD) in this work. The optical properties of the films as a function of the film composition were measured by vacuum ultraviolet (VUV) ellipsometer in the energy range of 0.6 to 8.5 eV, and they were investigated systematically based on the Gaussian dispersion model. Experimental results show that optical constants and bandgap of the hafnium silicate films can be tuned by the film composition, and a nonlinear change behavior of bandgap with SiO2 fraction was observed. This phenomenon mainly originates from the intermixture of d-state electrons in HfO2 and Si-O antibonding states in SiO2. |
Mendeley readers
The data shown below were compiled from readership statistics for 20 Mendeley readers of this research output. Click here to see the associated Mendeley record.
Geographical breakdown
| Country | Count | As % |
|---|---|---|
| Mexico | 1 | 5% |
| Unknown | 19 | 95% |
Demographic breakdown
| Readers by professional status | Count | As % |
|---|---|---|
| Student > Ph. D. Student | 6 | 30% |
| Student > Doctoral Student | 4 | 20% |
| Student > Master | 1 | 5% |
| Researcher | 1 | 5% |
| Student > Postgraduate | 1 | 5% |
| Other | 0 | 0% |
| Unknown | 7 | 35% |
| Readers by discipline | Count | As % |
|---|---|---|
| Engineering | 5 | 25% |
| Materials Science | 5 | 25% |
| Physics and Astronomy | 2 | 10% |
| Chemical Engineering | 1 | 5% |
| Agricultural and Biological Sciences | 1 | 5% |
| Other | 0 | 0% |
| Unknown | 6 | 30% |