Multicomponent and Multilayered Thin Films for Advanced Microtechnologies: Techniques, Fundamentals…
Springer Netherlands
Chapter title |
Influence of Sputter Gas Pressure and Substrate Bias on Intrinsic Stress and Crystallinity of Coatings Produced by Magnetron Sputtering
|
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Chapter number | 7 |
Book title |
Multicomponent and Multilayered Thin Films for Advanced Microtechnologies: Techniques, Fundamentals and Devices
|
Published by |
Springer, Dordrecht, January 1993
|
DOI | 10.1007/978-94-011-1727-2_7 |
Book ISBNs |
978-9-40-104757-9, 978-9-40-111727-2
|
Authors |
V. Teixeira, M. Andritschky |
Country | Count | As % |
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Unknown | 3 | 100% |
Readers by professional status | Count | As % |
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Unspecified | 2 | 67% |
Researcher | 1 | 33% |
Readers by discipline | Count | As % |
---|---|---|
Unspecified | 2 | 67% |
Unknown | 1 | 33% |