Ion Implantation: Equipment and Techniques
Springer Berlin Heidelberg
Chapter title |
CW-CO 2 -Laser Alloying of Au-Ge-Ni Ohmic Contacts on GaAs
|
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Chapter number | 61 |
Book title |
Ion Implantation: Equipment and Techniques
|
Published by |
Springer, Berlin, Heidelberg, January 1983
|
DOI | 10.1007/978-3-642-69156-0_61 |
Book ISBNs |
978-3-64-269158-4, 978-3-64-269156-0
|
Authors |
S. Tsou, W. Wang, C. Lin, G. Xia, Tsou, S., Wang, W., Lin, C., Xia, G. |