Ion Implantation: Equipment and Techniques
Springer Berlin Heidelberg
Chapter title |
Development Characteristics of Ga + Exposed PMMA and Associated Lithographic Resolution Limits
|
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Chapter number | 30 |
Book title |
Ion Implantation: Equipment and Techniques
|
Published by |
Springer, Berlin, Heidelberg, January 1983
|
DOI | 10.1007/978-3-642-69156-0_30 |
Book ISBNs |
978-3-64-269158-4, 978-3-64-269156-0
|
Authors |
L. Karapiperis, I. Adesida, C. A. Lee, E. D. Wolf, Karapiperis, L., Adesida, I., Lee, C. A., Wolf, E. D. |