Ion Implantation: Equipment and Techniques
Springer Berlin Heidelberg
Chapter title |
Planar Channeling of Si Implants in GaAs
|
---|---|
Chapter number | 50 |
Book title |
Ion Implantation: Equipment and Techniques
|
Published by |
Springer, Berlin, Heidelberg, January 1983
|
DOI | 10.1007/978-3-642-69156-0_50 |
Book ISBNs |
978-3-64-269158-4, 978-3-64-269156-0
|
Authors |
R. T. Blunt, I. R. Sanders, J. F. Singleton, Blunt, R. T., Sanders, I. R., Singleton, J. F. |