Ion Implantation: Equipment and Techniques
Springer Berlin Heidelberg
Chapter title |
Pulse-Laser-Induced Epitaxial Regrowth of Ion-Implanted Semiconductors
|
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Chapter number | 57 |
Book title |
Ion Implantation: Equipment and Techniques
|
Published by |
Springer, Berlin, Heidelberg, January 1983
|
DOI | 10.1007/978-3-642-69156-0_57 |
Book ISBNs |
978-3-64-269158-4, 978-3-64-269156-0
|
Authors |
C. Götz, W. Andrä, H.-D. Geiler, M. Wagner, Götz, C., Andrä, W., Geiler, H.-D., Wagner, M. |
Country | Count | As % |
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Unknown | 1 | 100% |
Readers by professional status | Count | As % |
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Student > Master | 1 | 100% |
Readers by discipline | Count | As % |
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Materials Science | 1 | 100% |