Ion Implantation: Equipment and Techniques
Springer Berlin Heidelberg
Chapter title |
A New Facility for Ion Beam Surface Analysis
|
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Chapter number | 34 |
Book title |
Ion Implantation: Equipment and Techniques
|
Published by |
Springer, Berlin, Heidelberg, January 1983
|
DOI | 10.1007/978-3-642-69156-0_34 |
Book ISBNs |
978-3-64-269158-4, 978-3-64-269156-0
|
Authors |
P. L. F. Hemment, J. E. Mynard, E. A. Maydell-Ondrusz, K. G. Stephens, Hemment, P. L. F., Mynard, J. E., Maydell-Ondrusz, E. A., Stephens, K. G. |