Ion Implantation: Equipment and Techniques
Springer Berlin Heidelberg
Chapter title |
Limitations of Ion Implantation in MOS Technology
|
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Chapter number | 45 |
Book title |
Ion Implantation: Equipment and Techniques
|
Published by |
Springer, Berlin, Heidelberg, January 1983
|
DOI | 10.1007/978-3-642-69156-0_45 |
Book ISBNs |
978-3-64-269158-4, 978-3-64-269156-0
|
Authors |
D. Widmann, U. Schwabe, Widmann, D., Schwabe, U. |