Ion Implantation: Equipment and Techniques
Springer Berlin Heidelberg
Chapter title |
Investigation of the Lifetime of Photocurrent Carriers in Si During Ion Implantation
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Chapter number | 36 |
Book title |
Ion Implantation: Equipment and Techniques
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Published by |
Springer, Berlin, Heidelberg, January 1983
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DOI | 10.1007/978-3-642-69156-0_36 |
Book ISBNs |
978-3-64-269158-4, 978-3-64-269156-0
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Authors |
T. Giedrys, V. Grivickas, L. Pranevicius, J. Vaitkus, Giedrys, T., Grivickas, V., Pranevicius, L., Vaitkus, J. |