Ion Implantation: Equipment and Techniques
Springer Berlin Heidelberg
Chapter title |
Performance of the Bethge-Baumann Ion Source with Radio Frequency Operation
|
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Chapter number | 6 |
Book title |
Ion Implantation: Equipment and Techniques
|
Published by |
Springer, Berlin, Heidelberg, January 1983
|
DOI | 10.1007/978-3-642-69156-0_6 |
Book ISBNs |
978-3-64-269158-4, 978-3-64-269156-0
|
Authors |
H. F. le Roux, A. G. K. Lutsch, le Roux, H. F., Lutsch, A. G. K. |