Ion Implantation: Equipment and Techniques
Springer Berlin Heidelberg
Chapter title |
A Forty-Channel Optical-Fiber Telecommunication System for Manipulation of High-Voltage Terminals in Ion Implanters
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Chapter number | 20 |
Book title |
Ion Implantation: Equipment and Techniques
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Published by |
Springer, Berlin, Heidelberg, January 1983
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DOI | 10.1007/978-3-642-69156-0_20 |
Book ISBNs |
978-3-64-269158-4, 978-3-64-269156-0
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Authors |
X. Chen, X. Zhang, S. Chen, Chen, X., Zhang, X., Chen, S. |