Ion Implantation: Equipment and Techniques
Springer Berlin Heidelberg
Chapter title |
Implant Processes for Bipolar Product Manufacturing and Their Effects on Device Yield
|
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Chapter number | 46 |
Book title |
Ion Implantation: Equipment and Techniques
|
Published by |
Springer, Berlin, Heidelberg, January 1983
|
DOI | 10.1007/978-3-642-69156-0_46 |
Book ISBNs |
978-3-64-269158-4, 978-3-64-269156-0
|
Authors |
J. L. Forneris, G. B. Forney, R. A. Cavanagh, G. Hrebin, J. L. Blouse, Forneris, J. L., Forney, G. B., Cavanagh, R. A., Hrebin, G., Blouse, J. L. |