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| Chapter title |
Einführung in die Halbleitertechnologie für integrierte Schaltungen
|
|---|---|
| Chapter number | 2 |
| Book title |
VENUS
|
| Published by |
Springer, Berlin, Heidelberg, January 1986
|
| DOI | 10.1007/978-3-662-10756-0_2 |
| Book ISBNs |
978-3-66-210757-7, 978-3-66-210756-0
|
| Authors |
Egon Hörbst, Martin Nett, Heinz Schwärtzel |