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| Chapter title |
Fabrication Technologies
|
|---|---|
| Chapter number | 3 |
| Book title |
MEMS Vibratory Gyroscopes
|
| Published by |
Springer, Boston, MA, January 2009
|
| DOI | 10.1007/978-0-387-09536-3_3 |
| Book ISBNs |
978-0-387-09535-6, 978-0-387-09536-3
|