↓ Skip to main content
What is this page? Embed badge

Metal Impurities in Silicon-Device Fabrication

Overview of attention for book
Cover of 'Metal Impurities in Silicon-Device Fabrication'

Table of Contents

  1. Altmetric Badge
    Book Overview
  2. Altmetric Badge
    Chapter 1 Introduction
  3. Altmetric Badge
    Chapter 2 Common Properties of Transition Metals
  4. Altmetric Badge
    Chapter 3 Properties of Transition Metals in Silicon
  5. Altmetric Badge
    Chapter 4 Properties of the Main Impurities
  6. Altmetric Badge
    Chapter 5 Properties of Rare Impurities
  7. Altmetric Badge
    Chapter 6 Detection Methods
  8. Altmetric Badge
    Chapter 7 Requirements of Modern Technology
  9. Altmetric Badge
    Chapter 8 Gettering of Impurities
  10. Altmetric Badge
    Chapter 9 Conclusion and Future Trends
Attention for Chapter 5: Properties of Rare Impurities
Altmetric Badge

Citations

dimensions_citation
189 Dimensions

Readers on

mendeley
1 Mendeley
Summary Dimensions citations
So far, Dimensions has found 189 publications that cite this research output.

189

The most recent citing publications are shown below. View all 189 publications that cite this research output on Dimensions.

This page shows the most recent citations of this research output.

Click here to find out how to access more activity.

This page is provided by Altmetric.