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Metal Impurities in Silicon-Device Fabrication

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Cover of 'Metal Impurities in Silicon-Device Fabrication'

Table of Contents

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    Book Overview
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    Chapter 1 Introduction
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    Chapter 2 Common Properties of Transition Metals
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    Chapter 3 Properties of Transition Metals in Silicon
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    Chapter 4 Properties of the Main Impurities
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    Chapter 5 Properties of Rare Impurities
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    Chapter 6 Detection Methods
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    Chapter 7 Requirements of Modern Technology
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    Chapter 8 Gettering of Impurities
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    Chapter 9 Conclusion and Future Trends
Attention for Chapter 7: Requirements of Modern Technology
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