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| Chapter title |
The Future of Controlled Environments
|
|---|---|
| Chapter number | 13 |
| Book title |
Cleanrooms
|
| Published by |
Springer, Dordrecht, January 1991
|
| DOI | 10.1007/978-94-011-7950-8_13 |
| Book ISBNs |
978-9-40-117952-2, 978-9-40-117950-8
|
| Authors |
M. Kozicki, S. Hoenig, P. Robinson, Kozicki, M., Hoenig, S., Robinson, P. |