MEMS/NEMS

Table of Contents

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   Book Overview
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   Chapter 1 Manufacturing Advisory Service System for Concurrent and Collaborative Design of MEMS Devices
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   Chapter 2 Web-Enabled Knowledge-Intensive Support Framework for Collaborative Design of MEMS
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   Chapter 3 Web-Enabled Database System Development for Design and Manufacturing of Micro-Electro-Mechanical Systems (MEMS)
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   Chapter 4 Techniques in Proper Orthogonal Decomposition and Component Mode Synthesis for the Dynamic Simulation of Complex MEMS Devices and Their Applications
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   Chapter 5 Techniques in Global Optimal Design for MEMS & Their Applications
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   Chapter 6 Theory and Design of Micromechanical Vibratory Gyroscopes
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   Chapter 7 A Hierarchical Design Platform for Microelectrofluidic Systems (MEFS)
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   Chapter 8 Techniques in Electrostatics Analysis of MEMS and Their Applications
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    Chapter 9 Techniques for Efficient Analytical and Simulation Methods in the Prototyping of MEMS Systems
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    Chapter 10 Techniques in the Fabrication of High-Speed Micro-Rotors for MEMS Applications
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    Chapter 11 Fabrication Techniques in Micromachined Capacitive Ultrasonic Transducers and their Applications
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    Chapter 12 GaAs Thermally Based MEMS Devices—Fabrication Techniques, Characterization and Modeling
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    Chapter 13 Novel MEMS Fluidic Integrated Circuit Technology with ‘MOSFET-Like Microvalve Elements’
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    Chapter 14 Hydrogel-based μTAS
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    Chapter 15 Crosslinked PMMA as a Low-Dimensional Dielectric Sacrificial Layer for MEMS/NEMS and Quantum Nanostructures Fabrication
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    Chapter 16 MEMS/NEMS Techniques and Applications
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    Chapter 17 Techniques in the Development of Micromachine Tool Prototypes & Their Applications in Microfactories MET Technology
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    Chapter 18 Tool-based Micro Machining and Applications in MEMS
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    Chapter 19 Micro-machined Passive Valves: Fabrication Techniques, Characterisation and their Application
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    Chapter 20 Rapid Prototyping and Rapid Tooling Techniques for the Manufacturing of Silicon, Polymer, Metal and Ceramic Microdevices
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    Chapter 21 Injection Molding Techniques for the Fabrication of MEMS Elements
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    Chapter 22 Excimer Laser Micromachined Three-dimensional Microstructures—Techniques and Applications
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    Chapter 23 Techniques in Scanning Acoustic Microscopy for Enhanced Failure and Material Analysis of Microsystems
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    Chapter 24 Production Scheduling in MEMS Manufacturing
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    Chapter 25 MEMS-based Accelerometers and their Application to Vibration Suppression in Hard Disk Drives
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    Chapter 26 Micromachined Thermal Accelerometer without Proof Mass
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    Chapter 27 Techniques in MEMS Devices for Micro Humidity Sensors and Their Applications
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    Chapter 28 Modeling the Electromechanical Response of Electrostatic Actuators
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    Chapter 29 Micropumps for MEMS/NEMS and Microfluidic Systems
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    Chapter 30 FEM (Finite Element Modeling) Techniques for Electrostatic Microactuators
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    Chapter 31 Techniques in the Design of Thermomechanical Microactuators
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    Chapter 32 Techniques in MEMS Microthermal Actuators and Their Applications
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    Chapter 33 Techniques in Residual Stress Measurement for MEMS and Their Applications
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    Chapter 34 Techniques in Sonophoresis Biomedical Devices and Their Applications
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    Chapter 35 MEMS Application of Actuators and Sensors for Glaucoma Treatment
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    Chapter 36 Single-Crystal Silicon Based Electrothermal MEMS Mirrors for Biomedical Imaging Applications
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    Chapter 37 Techniques in the Development of Endovascular Microtools & Their Applications
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    Chapter 38 Techniques in the Design and Fabrication of Optical MEMS Switches and their Application in Optical Communication Systems
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    Chapter 39 Micromachining Techniques and MEMS Structures in Optical Interferometric Sensors
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    Chapter 40 Magnetic Microactuators—Techniques and Applications
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    Chapter 41 Techniques in the Design of Micro-Machined Electrostatic Torsion Micro-Mirrors and Their Applications
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    Chapter 42 Vertical Combdrive Actuator: Design and Fabrication for Micromirror Applications
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    Chapter 43 Three-Dimensional Techniques for FEM Simulations in Laser Modules and Their Applications