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Chapter title |
MEMS-based microsensors using piezoelectric thin films as sensors and actuators
|
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Chapter number | 4 |
Book title |
Materials Challenges and Testing for Manufacturing, Mobility, Biomedical Applications and Climate
|
Published by |
Springer, Cham, January 2014
|
DOI | 10.1007/978-3-319-11340-1_4 |
Book ISBNs |
978-3-31-911339-5, 978-3-31-911340-1
|
Authors |
Takeshi Kobayashi, Hironao Okada, Natsumi Makimoto, Syoji Oyama, Hiroshi Funakubo, Tohishiro Itoh, Ryutaro Maeda |