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Silizium-Halbleitertechnologie

Overview of attention for book
Cover of 'Silizium-Halbleitertechnologie'

Table of Contents

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    Book Overview
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    Chapter 1 Einleitung
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    Chapter 2 Herstellung von Siliziumscheiben
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    Chapter 3 Oxidation des Siliziums
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    Chapter 4 Lithografie
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    Chapter 5 Ätztechnik
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    Chapter 6 Dotiertechniken
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    Chapter 7 Depositionsverfahren
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    Chapter 8 Metallisierung und Kontakte
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    Chapter 9 Scheibenreinigung
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    Chapter 10 MOS-Technologien zur Schaltungsintegration
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    Chapter 11 Erweiterungen zur Höchstintegration
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    Chapter 12 Bipolar-Technologie
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    Chapter 13 Montage integrierter Schaltungen
Attention for Chapter 6: Dotiertechniken
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