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Chapter title |
Low Temperature Ion-Assisted Epitaxy of Deposited Silicon Layers
|
---|---|
Chapter number | 9 |
Book title |
ESPRIT ’90
|
Published by |
Springer, Dordrecht, January 1990
|
DOI | 10.1007/978-94-009-0705-8_9 |
Book ISBNs |
978-9-40-106803-1, 978-9-40-090705-8
|
Authors |
F. Priolo, C. Spinella, E. Rimini, Priolo, F., Spinella, C., Rimini, E. |