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Chemical Vapor Deposition Polymerization

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Cover of 'Chemical Vapor Deposition Polymerization'

Table of Contents

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    Book Overview
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    Chapter 1 Introduction
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    Chapter 2 Deposition Equipment
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    Chapter 3 Step-by-Step Guide to Depositing Parylene
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    Chapter 4 Parylene-N Precursor Chemistry
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    Chapter 5 Deposition Kinetics for Polymerization via the Gorham Route
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    Chapter 6 Film Properties
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    Chapter 7 Other CVD Polymers
Attention for Chapter 3: Step-by-Step Guide to Depositing Parylene
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