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Chapter title |
Development of the Evacuation Systems for JEMs
|
---|---|
Chapter number | 4 |
Book title |
Historical Evolution Toward Achieving Ultrahigh Vacuum in JEOL Electron Microscopes
|
Published by |
Springer, Tokyo, January 2014
|
DOI | 10.1007/978-4-431-54448-7_4 |
Book ISBNs |
978-4-43-154447-0, 978-4-43-154448-7
|
Authors |
Nagamitsu Yoshimura, Yoshimura, Nagamitsu |