You are seeing a free-to-access but limited selection of the activity Altmetric has collected about this research output.
Click here to find out more.
Chapter title |
Fabrication of Small Structures of Semiconductors and Metals
|
---|---|
Chapter number | 12 |
Book title |
The Physics and Fabrication of Microstructures and Microdevices
|
Published by |
Springer, Berlin, Heidelberg, January 1986
|
DOI | 10.1007/978-3-642-71446-7_12 |
Book ISBNs |
978-3-64-271448-1, 978-3-64-271446-7
|
Authors |
H. G. Craighead |